Home IMPRS-STNS Events Recent Events Speaker: Dr. Niels Tas Location: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale) Jan Feb Mar Apr May Jun Jul Aug Sep Oct Nov Dec All All 2022 2021 2020 2019 2018 2017 2016 2015 Silicon based 3D-nanomachining for wafer-scale fabrication of nano-devices Tutorial Date: May 29, 2019 Time: 04:00 PM (Local Time Germany) Speaker: Dr. Niels Tas University of Twente Location: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale) Host: IMPRS-STNS [more]