Scientific module: Top-down nanofabrication

Preparation

Each participating PhD student or postdoc prepares some slides to introduce typical structures and devices that are fabricated in his/her project.

Preliminary schedule

December 6, 2023

15:00 - 15:15 Walk-in, coffee + introduction
15:15 - 16:30 Short project presentations
16:30 - 17:00 Discussion, choose topics, form groups (2-3) to work together the next day

December 7, 2023

09:00 - 09:30 Coffee + Introducing the day
09:30 - 10:00 First short lecture: silicon wet/dry etching, oxidation, silicon nitride and a-Si LPCVD (Niels Tas)
10:05 - 10:35 Second short lecture: ALD, sputtering, electron beam lithography (Andrea Migliorini + Haojie Zhang)
10:35 - 10:45 Coffee break
10:45 - 11:45 First phase group design (conceptual design: working principle + fabrication approach)
11:45 - 12:45 Lunch + discussing the concepts and approaches
13:00 - 13:30 Third short lecture: self-aligned (3D) silicon based nano-fabrication (Niels Tas + Erwin Berenschot)
13:30 - 15:15 Second phase group design (Detailed fabrication) incl. discussions with instructors
15:30 - 16:30 Coffee + prepare some slides
16:30 - 17:30 Group presentations + discussions
17:30 - 18:00 Conclusions + feedback