Publikationen von Bodo Kalkofen
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Zeitschriftenartikel (2)
2022
Zeitschriftenartikel
9 (12), 2200013 (2022)
Atomic layer deposition of the conductive delafossite PtCoO2. Advanced Materials Interfaces 2019
Zeitschriftenartikel
40 (9), S. 1507 - 1510 (2019)
Boosting n-type doping levels of Ge with co-doping by integrating plasma-assisted atomic layer deposition and flash annealing process. IEEE Electron Device Letters