Home IMPRS-STNS Events Events Speaker: Dr. Bodo Kalkofen, Dr. Dirk Hagen Host: IMPRS-STNS Jan Feb Mar Apr May Jun Jul Aug Sep Oct Nov Dec All All 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 Atomic Layer Deposition (ALD) of thin films for nanotechnological applications Tutorial Date: Oct 23, 2019 Time: 16:00 - 18:00 Speaker: Dr. Bodo Kalkofen, Dr. Dirk Hagen Max-Planck-Institute of Microstructure Physics Location: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale) Room: Lecture Hall, B.1.11 Host: IMPRS-STNS [more]