Atomic Layer Deposition (ALD)
Research report (imported) 2006 - Max Planck Institute of Microstructure Physics
Summary
Nanostructures are in the focus of research in technology, medicine and biology. The Max Planck Institute of Microstructure Physics in Halle currently develops a major research project which deals with the deposition of thin inorganic films, biological, organic and inorganic nanostructures and the exploitation of such functionalized materials, for applications in medicine, electronics, catalysis, and sensing.