Home Events Archive 2019 Archive 2019 Speaker: Dr. Bodo Kalkofen, Dr. Dirk Hagen Location: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale) Atomic Layer Deposition (ALD) of thin films for nanotechnological applications Tutorial Date: Oct 23, 2019 Time: 04:00 PM - 06:00 PM (Local Time Germany) Speaker: Dr. Bodo Kalkofen, Dr. Dirk Hagen Max-Planck-Institute of Microstructure Physics Location: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale) Room: Lecture Hall, B.1.11 Host: IMPRS-STNS [more]
