Publications of Bodo Kalkofen
All genres
Journal Article (2)
2022
Journal Article
9 (12), 2200013 (2022)
Atomic layer deposition of the conductive delafossite PtCoO2. Advanced Materials Interfaces 2019
Journal Article
40 (9), pp. 1507 - 1510 (2019)
Boosting n-type doping levels of Ge with co-doping by integrating plasma-assisted atomic layer deposition and flash annealing process. IEEE Electron Device Letters